6 eV) photoelectron

spectrometer. The base pressure of the XPS system was 5.2 × 10-9 Torr. Results and discussion Figure 1a,b,c,d,e,f illustrates the SEM images of Fe nanoparticles on Si(100) and Si(111) substrates at 900°C by applying the thermal chemical vapor deposition method. In the case of Si(100) substrate, as the σ of the silicon substrate increases, the average size of the Fe particles increases while the average density of the Fe particles decreases, as shown in Figure 1a,b,c. Figure 2 shows a plot of the average size of Fe particles versus the electrical conductivity of the Si(100) substrate. We conducted three different CHIR98014 experiments and calculated the average Luminespib values of the sizes and the densities of the nanoparticles to confirm the reproducibility of our experiment. We found that the

average sizes of the Fe particles for substrates U(100), L(100), and H(100) were 55.6, 58.3, and 65.7 nm, respectively. This tendency is coincident with our previous results [9]. However, on the other hand, the average Fe particle size decreased as the electrical conductivity (σ) of Si(111) increased (Figure 1d,e,f). In the case of Si(111) substrate, as the σ of the silicon substrate increases, the average size of the Fe particles decreases while the average density of the Fe particles increases. It was found that the average sizes of the Fe particles for substrates U(111), L(111), and H(111) were 37.9, 30.8, and 28.6 nm, respectively. This result is opposite to that of the Si(100) substrate. Figure 3

shows the histograms of the particle size distribution on both Si(100) and Si(111) substrates. Figure 1 Surface morphology of the samples. (a) U(100), (b) L(100), (c) H(100), (d) U(111), (e) L(111), (f) H(111). Figure 2 Plot of Fe particle average size and density versus Si(100) and Si(111) substrate electrical conductivity. Figure 3 Histograms of the particle size distribution of Si(100) and Si(111) substrates. The contrary tendency of Fe particle size according to substrate orientation could be explained that agglomeration and segregation of Fe particles were affected by atomic density, surface energy, and thermal conductivity of different Si surface orientations at the same thermal condition. RAS p21 protein activator 1 The binding energy between Fe film and Si(100) substrate is smaller than that between Fe film and Si(111) substrate. In addition, the surface energy of Si(100), 2.13 J/cm2, is almost twice higher than that of Si(111), 1.23 J/cm2. Accordingly, it is expected that the catalytic particles could more easily migrate on Si(100) surface by thermal energy. Under these conditions, there exists a high probability of Fe particle agglomeration. Indeed, it was observed that the average diameter of Fe particles on Si(100) substrate was larger than that on Si(111) substrate.